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Design and fabrication of a compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source

Qingyue Li Vincent Raimbault 1 Philippe Menini 1 Thierry Camps 1 Véronique Bardinal 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : A compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source is designed for health and environmental applications. The overall system is optimized using simulation tools by considering cleanroom fabrication tolerances. First fabrication results on 3D printed lens for VCSEL collimation and 800nm period aluminum grating couplers are highlighted.
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https://hal.laas.fr/hal-02988370
Contributor : Philippe Menini Connect in order to contact the contributor
Submitted on : Wednesday, November 4, 2020 - 5:01:30 PM
Last modification on : Wednesday, July 28, 2021 - 10:30:01 AM
Long-term archiving on: : Friday, February 5, 2021 - 7:00:16 PM

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  • HAL Id : hal-02988370, version 1

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Qingyue Li, Vincent Raimbault, Philippe Menini, Thierry Camps, Véronique Bardinal. Design and fabrication of a compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source. 22nd Photonics North Conference, May 2020, Vancouver, Canada. ⟨hal-02988370⟩

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