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Fabrication an simulation of a PZT energy scavenging MEMS

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https://hal.laas.fr/hal-03167923
Contributor : Emilie Marchand <>
Submitted on : Friday, March 12, 2021 - 3:32:45 PM
Last modification on : Thursday, June 10, 2021 - 3:48:21 AM

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  • HAL Id : hal-03167923, version 1

Citation

Gustavo Aldolfo Ardila Rodriguez, Hugo Durou, Lamine Ourak, David Colin, Carole Rossi, et al.. Fabrication an simulation of a PZT energy scavenging MEMS. 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2008), Nov 2008, Sendai, Japan. ⟨hal-03167923⟩

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