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Fiabilité des diodes de protection ESD soumises à des décharges électrostatiques répétitives

Marianne, Amemagne Diatta 1
1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The sensitivity of integrated devices towards electrostatic discharge (ESD) is still highly topical with the reduction of technological dimensions. The electronic applications that have become more portable suffer in their harsh external environment. Indeed, the industrial developments associated to the severity of the environment lead to high reliability requirements from customers. Thus, the specifications that were initially limited to electronic systems are now being extended to integrated circuits and discrete devices. To ensure excellent levels of reliability, including for repetitive ESD, we implemented a methodology to study and understand the failure mechanisms by means of physical characterization, electrical characterization and electro-thermal simulation. New customer specifications require not only an ESD robustness of 15 kV (following IEC 61000-4-2 type of standard) but also a guaranteed endurance to the repetition of 1000 electrostatic discharges at 15 KV stress level. Bidirectional diodes are often localized at the input and output connections of integrated circuits. These devices are used to ensure protection against electrostatic discharge that may arise during the lifetime of the system. In this work, physical investigations and failure analyses were performed to draw the degradation scenario describing the nature of the defect and its evolution. By confronting electro-thermal simulation and experimental results, we confirmed the physical phenomena such as electro-thermo-migration arise during repeated ESD event. Finally, an optimization of the diode reliability in term of endurance is demonstrated by an improvement of the manufacturing process.
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Marianne, Amemagne Diatta. Fiabilité des diodes de protection ESD soumises à des décharges électrostatiques répétitives. Micro et nanotechnologies/Microélectronique. Université Toulouse 3 Paul Sabatier (UT3 Paul Sabatier), 2012. Français. ⟨tel-01946859⟩

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