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Caractérisation et intégration fonctionnelle de nanohélices inorganiques et métalliques : vers un nanosystème électromécanique

Sabrina Habtoun 1
1 LAAS-MEMS - Équipe Microsystèmes électromécaniques
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Nanohelices are helical nanostructures exhibiting great flexibility and surface/volume ratio. This work studies the integration intoNEMSof silica nanohelices fabricated by auto-assembly in solution and sol-gel deposition.We used a capillary assembly method to align them onmicrostructured substrates with trenches and electrodes for subsequent mechanical and electrical characterization. They were then rendered conductive by a FIB (Focused Ion Beam) deposition which allowed metallization and clamping in one lithography-free step. AFM (Atomic Force Microscope) mechanical measurements demonstrated their flexibility (0.1 N/m) and large linear domain. Their length and metallization allow tuning of these properties, which were confirmed by FEM simulation. Electrical measurements by the means of a 4-probe- Scanning Tunneling Microscope exhibited an ohmic behavior and hinted at a metallic piezoresistance effect. Finally, a resonator based on a single nanohelix was designed and fabricated. Its characterization should allow us to measure the dynamic electromechanical properties of the nanostructures. A new project will study their integration on soft substrates for strain gauges for biology.
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Sabrina Habtoun. Caractérisation et intégration fonctionnelle de nanohélices inorganiques et métalliques : vers un nanosystème électromécanique. Micro et nanotechnologies/Microélectronique. Institut national des sciences appliquées de Toulouse, 2016. Français. ⟨tel-02474485⟩

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