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Conception et réalisation d'une source VCSEL accordable pour un microsystème d'analyse de la peau par Tomographie par Cohérence Optique (OCT)

Benjamin Boisnard 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This work deals with the design, realization and characterization of a spectrally-tunable VCSEL (Vertical-Cavity Surface-Emitting Laser) to be integrated in a portable SS-OCT microsystem (Swept-Source Optical Coherence Tomography) for early detection of skin diseases. Our approach for tunable source fabrication is based on of the use of an intracavity nematic liquid crystal layer (LC). This will lead to a better mechanical stability and a lower driving voltage than for the classical case of electrostatic MEMS integration at the surface of the half-VCSEL. It is however necessary to solve several technological issues to master the hybrid integration of CL microcells in a III-V-based photonic device and to combine LC molecules alignment with electrical injection in the device. To this end, an original method for collective fabrication of polymer-based microcells is developed, exploiting the advantages of a soft-nanoimprint equipment. This generic met! hod is validated by the fabrication of several optical tunable devices operating at 1.55μm (high-finesse optical filters, photodetector arrays and optically-pumped VCSELs) for telecom or miniaturized spectroscopy applications. A laser emission at room temperature in continuous regime is obtained for the first time with a tuning range of 23.5 nm for an applied voltage of 20V. A tunable electrically-pumped VCSEL operating at 850nm is also designed and fabricated. First results show a laser effect observed on the half-VCSEL part placed in an external cavity configuration. A spectral tunability of the electroluminescence peak of the complete device over 10nm is also obtained for 20V applied.
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Benjamin Boisnard. Conception et réalisation d'une source VCSEL accordable pour un microsystème d'analyse de la peau par Tomographie par Cohérence Optique (OCT). Micro et nanotechnologies/Microélectronique. Université Toulouse 3 Paul Sabatier (UT3 Paul Sabatier), 2019. Français. ⟨tel-02885125v2⟩

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