Skip to Main content Skip to Navigation
Theses

Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS

Abstract : Since two decades now, microscopic electronic devices including moving parts, called MicroElectroMechanical Systems (MEMS) have had a growing impact on industry and daily lives. Their range of application is already wide: from actuators (inkjet print heads, digital cinema projectors, etc.) to mechanical sensors (microphones, accelerometers, etc.). There is a growing research effort in the biosensing field as well. One of the main challenges for this application is to integrate a miniaturized and robust element to a vibrating beam-like structure, in order to achieve electromechanical actuation and detection, i.e. to convert an electrical signal into vibration and vice versa. In this work, we studied the integration of three dielectric materials on silicon microcantilevers, and successfully demonstrated the feasibility of simultaneous flexural actuation and detection of the structures by mean of dielectric transduction. Those results are one step forward the elaboration of mature detection systems.
Complete list of metadata

Cited literature [73 references]  Display  Hide  Download

https://hal.laas.fr/tel-02003088
Contributor : Abes Star :  Contact
Submitted on : Wednesday, December 4, 2019 - 2:07:09 PM
Last modification on : Thursday, June 10, 2021 - 3:05:39 AM
Long-term archiving on: : Thursday, March 5, 2020 - 8:36:05 PM

File

2018TOU30302a.pdf
Version validated by the jury (STAR)

Identifiers

  • HAL Id : tel-02003088, version 2

Citation

Cécile Fuinel. Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS. Mécanique des matériaux [physics.class-ph]. Université Paul Sabatier - Toulouse III, 2018. Français. ⟨NNT : 2018TOU30302⟩. ⟨tel-02003088v2⟩

Share

Metrics

Record views

167

Files downloads

248